Fabrication of Carbon Nanostructure onto the Apex of Scanning Tunneling Microscopy Probe by Chemical Vapor Deposition

• Yoshimura Masamichi

  Nano High-Tech Research Center, Toyota Technological Institute

• Jo Sadaharu

  Nano High-Tech Research Center, Toyota Technological Institute

• Ueda Kazuyuki

  Nano High-Tech Research Center, Toyota Technological Institute

抄録

Microwave plasma-enhanced chemical vapor deposition (MW-PECVD) has been applied to fabricate a novel scanning tunneling microscopy (STM) probe with carbon nanostructures on its apex. Prior to CVD growth, a platinum-paladium thin film (60 nm), as the catalyst, is coated on the apex of the conventional STM tip (made of tungsten, 0.3 mm φ). The tip is positioned perpendicular to the electrode with a lightning conductor to avoid the bombardment of ions in the plasma. A mixed gas of CH₄ and H₂ is used in CVD and thousands of carbon nanorods are fabricated on the tip apex under the optimum conditions. It is demonstrated that the prepared probe can resolve an atomic lattice image of the graphite surface.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 42 (7B), 4841-4843, 2003

  The Japan Society of Applied Physics

キーワード

• carbon nanotube
• scanning tunneling microscopy
• probe
• CVD
• nanorods

詳細情報

• CRID: 1390282681231203456
• NII論文ID: 210000053920
• NII論文ID: 10011447008
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.42.4841
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/00214922
• NDL書誌ID: 6630201
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6630201
• Web Site: http://stacks.iop.org/1347-4065/42/i=7S/a=4841/pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可