Correlation of the Anisotropic Etching of Single-Crystal Silicon Spheres and wafers

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Journal

  • J. Appl. Phys.

    J. Appl. Phys. 46, 1478, 1975

Cited by:  1

Codes

  • NII Article ID (NAID)
    10011634462
  • NII NACSIS-CAT ID (NCID)
    AA00693547
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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