各種粉末の焼結機構と新しい焼結技術の展開  AlNのミリ波焼結における最適Yb2O3助剤添加量の検討

書誌事項

タイトル別名
  • Optimization of Content of Yb2O3 Sintering Aid in Millimeter-Wave Sintering of AlN
  • AlN ミリハ ショウケツ ニ オケル サイテキ Yb2O3 ジョザイ テンカリョウ ノ ケントウ

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抄録

Millimeter-wave sintering of aluminum nitride for various contents of Yb2O3 sintering aid was performed under nitrogen atmosphere. Densification temperature to obtain more than 95%T.D. nonlinearly depended on the Yb2O3 content and it was found that the lowest temperature for a densification over 96%T.D. was 1600°C in the 5 wt% Yb2O3-added A1N. Dependence of densification temperature on the Yb2O3 content was closely related with liquidus temperature in the binary Yb2O3-Al2O3 phase diagram. The low densification temperature was attributed to the eutectic temperature between Yb2O3 and Yb3Al5O12. Thermal conductivity of sintered A1N increased drastically with the content of Yb2O3 up to 3 wt%. No remarkable improvement in the thermal conductivity in the range over 3 wt% Yb2O3 was caused by excess amount of Yb2O3 in the sintered AIN.

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