Mechanical Testing of Micro-Sized Specimens

• TAKASHIMA Kazuki

  Precision & Intelligence Laboratory, Tokyo Institute of Technology

• HIGO Yakichi

  Precision & Intelligence Laboratory, Tokyo Institute of Technology

Bibliographic Information

Other Title

• マイクロサイズ試験片を用いた材料試験

Journal

• 熱処理

  熱処理 44 (1), 1-2, 2004-02-28

Keywords

• MEMS
• Thin Film
• Mechanical Properties
• Fracture
• Fatigue
• Reliability

Details

• CRID: 1570291225196907520
• NII Article ID: 10012104674
• NII Book ID: AN00199575
• ISSN: 02880490
• Text Lang: ja
• Data Source:
  • CiNii Articles
  • KAKEN