Titanium Coating of Scaffold Carbon Foam by ECR Sputtering

• Petrica Lungu Cristian 

  Japan Ultra-high Temperature Materials Research Institute

• Matsumura Yoshikazu

  Japan Ultra-high Temperature Materials Research Institute

• Yoshinari Masao

  Tokyo Dental College

抄録

Titanium films, of 5 \\micron in thickness were deposited uniformly on three-dimensional structures of scaffold carbon foam substrates using a hybrid electron cyclotron resonance-direct current (ECR-DC) sputtering system. A cylindrical hollow cathode with internal diameter of 80 mm and external diameter of 90 mm and length of 60 mm, negatively biased, was used as titanium atoms supplier. The DC sputtering voltage applied to the target controlled the feeding with excited titanium atoms. The Vickers micro-hardness of the films was found to be in the range of 250–300 HV. The film surfaces were smooth and showing pure titanium, preferentially grown on the Ti (100) crystallographic phase. Flexural strength and elastic modulus of the carbon foam were improved by a factor of 1.5 and 2.6 respectively.

収録刊行物

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 43 (12), 3025-3027, 2002

  公益社団法人 日本金属学会

キーワード

• scaffold carbon foam
• sputtering
• biocompatible material
• titanium film
• isotropic deposition

詳細情報

• CRID: 1390282679222258304
• NII論文ID: 10012328921
• NII書誌ID: AA1151294X
• DOI: 10.2320/matertrans.43.3025
• COI: 1:CAS:528:DC%2BD3sXhtF2msr4%3D
• ISSN: 13475320
• ISSN: 13459678
• NDL書誌ID: 6395092
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6395092
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/43/12/43_12_3025/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可