Infrared Attenuated Total Reflection by Chemomechanically Polished (0001) Surface of 6H-SiC

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  • Kuroda Noritaka
    Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University
  • Iida Youhei
    Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University
  • Shigeta Takashi
    Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University
  • Hasanudin
    Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University
  • Watanabe Junji
    Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University

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Abstract

The Si-terminated (0001) surface having a roughness of 0.5 nm, which is obtained by polishing with Cr2O3 abrasive, of 6H-SiC crystals has been examined by the infrared attenuated total reflection spectroscopy. Clear resonance attenuation is observed due to surface phonon-polariton waves propagating in the surface. Additional resonances due to the surface waves and longitudinal-optical (LO) phonons are found to be induced by the surface roughness through the elastic scattering process. It turns out from these observations that the subsurface SiC lattices retain the 6H polytypism well.

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