High-Resolution Beam Profiler for Engineering Laterally-Grown Grain Morphology

• JYUMONJI Masayuki

  Advanced LCD Technologies Development Center Co., Ltd.(ALTEDEC)

• KIMURA Yoshinobu

  Advanced LCD Technologies Development Center Co., Ltd.(ALTEDEC)

• HIRAMATSU Masato

  Advanced LCD Technologies Development Center Co., Ltd.(ALTEDEC)

• TANIGUCHI Yukio

  Advanced LCD Technologies Development Center Co., Ltd.(ALTEDEC)

• MATSUMURA Masakiyo

  Advanced LCD Technologies Development Center Co., Ltd.(ALTEDEC)

Journal

• IEICE Trans. Electronics

  IEICE Trans. Electronics 86 (11), 2275-2277, 2003-11-01

Keywords

• beam profiler
• excimer laser
• lateral-grain growth
• phase-modulated excimer laser crystallization

Details

• CRID: 1574231874878551424
• NII Article ID: 10012451847
• NII Book ID: AA10826283
• ISSN: 09168524
• Text Lang: en
• Data Source:
  • CiNii Articles