Piezoelectric Films for Acoustic Wave Devices

• HASHIMOTO Ken-ya

  Dept. Electronics & Mechanical Eng., Chiba University

Bibliographic Information

Other Title

• 弾性波デバイス開発の立場から見た圧電薄膜
• ダンセイハ デバイス カイハツ ノ タチバ カラ ミタ アツデン ハクマク

Journal

• Shinku

  Shinku 46 (11), 777-781, 2003

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679041337216
• NII Article ID: 10012512318
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.46.777
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 6762390
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6762390
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles