Dependence on Vacuum Pressure for Tribological Properties of Ti, TiO<sub>2</sub> and TiN Thin Film
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- Sasaki Michiko
- Department of Electrical Engineering, Kogakuin University, Advanced Materials Center, Kogakuin University
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- Nakamura Isao
- Advanced Materials Center, Kogakuin University
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- Takano Ichiro
- Department of Electrical Engineering, Kogakuin University, Advanced Materials Center, Kogakuin University
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- Sawada Yoshio
- Department of Electrical Engineering, Kogakuin University, Advanced Materials Center, Kogakuin University
Bibliographic Information
- Other Title
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- Ti,TiO<sub>2</sub>およびTiN薄膜の摩擦·摩耗特性に対する雰囲気圧力依存性
- Ti,TiO2およびTiN薄膜の摩擦・摩耗特性に対する雰囲気圧力依存性
- Ti TiO2 オヨビ TiN ハクマク ノ マサツ マモウ トクセイ ニ タイスル フンイキ アツリョク イゾンセイ
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Abstract
Tribological properties of Ti-based (Ti, TiO2 and TiN) thin films on a stainless steel (304SS) substrate were investigated at several pressures in an atmosphere of the air. Films 0.2 µm thick were prepared on a mirror-polished substrate using each method of ion beam assisted deposition, ion beam assisted reactive deposition and dynamic ion beam mixing. The tribological test was carried out with a tribo meter of a pin-on-disk type in a high vacuum chamber. The wear surface was observed with a scanning laser microscope and a scanning electron microscope. The friction coefficient of stainless steel in a pressure of 1×105 Pa showed a lower value than that in 1×10-5 Pa, because oxygen or moisture contained in the air played a role of lubrication. Also the TiN thin film in 1×105 Pa showed a low friction coefficient until wearing the TiN layer on a substrate at a sliding distance of 10 m. However friction coefficients of the TiO2 and Ti thin film were hardly dependent on a gas pressure. In the case of 5 m in a sliding distance, friction coefficients of Ti-based thin films converged on 0.3 at a pressure of 1×10-3 Pa.
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 123 (11), 1108-1114, 2003
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679569962112
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- NII Article ID
- 10012555616
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 6751186
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed