Nd–Fe–B Thin Films with Perpendicular Magnetic Anisotropy and High Coercivity Prepared by Pulsed Laser Annealing

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Amorphous, as-deposited Nd–Fe–B films prepared by RF-sputtering were annealed by irradiating pulsed KrF excimer laser (248 nm). A pulse of 20 ns in width and 4 kJ/m2 in power density was irradiated onto a 2 μm-thick as-deposited film kept at 400°C. It is observed that, by a single shot of the pulse, Nd2Fe14B $\Phi$ phase crystallized with prominent texturing of $c$-axis along the film normal. Annealed films showed excellent magnetic characteristics; $M_{\text{s}}=0.978$ T, $M_{\text{r}}=0.906$ T, ${_{\text{i}}}H_{\text{c}}=1272$ kA/m, and $(BH)_{\text{MAX}}=161$ kJ/m3. This process is also found to be successfully applicable to a 20 μm-thick film. Using 2 μm-thick as-deposited film kept at 400°C, micro-magnet patterns of 100 μm in width and 1–2 mm in length were fabricated by irradiating a 20-ns pulse shot through a patterned mask. The patterned area revealed that magnetizations are directed along the film normal with coercivity higher than 1200 kA/m.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 42(11), 6859-6864, 2003-11-15

    公益社団法人 応用物理学会

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  • Structure and Magnetic Properties of Nd-Fe-B Films

    Mizutani N. , Okuda T. , Nakanishi A. , NISHIYAMA J. , MOTOKAWA M. , WANG Zhongjie , ADACHI N. , OHSATO H.

    日本応用磁気学会誌 00023(00001), 297-299, 1999-01-20

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各種コード

  • NII論文ID(NAID)
    10012563954
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    6752385
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  J-STAGE  JSAP 
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