高いキュリー温度を有する強誘電体エピタキシャル薄膜の圧電特性 Piezoelectric Properties of Ferroelectric Epitaxial Films with High Curie Temperature

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The ferroelectric and piezoelectric properties of Pb(Yb<sub>1/2</sub>Nb<sub>1/2</sub>)O<sub>3</sub>-PbTiO<sub>3</sub> (PYbN-PT) and BiScO<sub>3</sub>-PbTiO<sub>3</sub> (BiScO<sub>3</sub>-PT) epitaxial films were investigated. The PYbN-PT(50/50) and BiScO<sub>3</sub>-PT(50/50) films showed a curie temperature near 380 and 450 °C, respectively. For 1 μm-thick PYbN-PT epitaxial films, the highest remanent polarization (29 μC/cm<sup>2</sup>) and effective piezoelectric coefficient e<sub>31,f</sub> (-14 C/m<sup>2</sup>) were observed in the (001) PYbN-PT (50/50) film. A 3 μm-thick (001) PYbN-PT (50/50) film exhibited a higher e<sub>31,f</sub> coefficient of -19 C/m<sup>2</sup>. (001) BiScO<sub>3</sub>-PT epitaxial films also had well saturated hysteresis loops with a remanent polarization of 36 μC/cm<sup>2</sup>. The e<sub>31,f</sub> piezoelectric coefficient was -9 C/m<sup>2</sup>. The obtained piezoelectric properties of BiScO<sub>3</sub>-PT films were comparable to that of Pb(Zr, Ti)O<sub>3</sub> or relaxor ferroelectric-PbTiO<sub>3</sub> films.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 124(4), 117-123, 2004-04-01

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10012703985
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    6909568
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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