Development of finger-sized ultrasmall electron microscope

• MIYOSHI Motosuke

  Research Center for Advanced Science and Technology, The University of Tokyo

Bibliographic Information

Other Title

• 親指サイズ電子顕微鏡の研究・開発
• 研究紹介 親指サイズ電子顕微鏡の研究・開発
• ケンキュウ ショウカイ オヤユビ サイズ デンシ ケンビキョウ ノ ケンキュウ カイハツ

Abstract

A miniaturized electrooptical column is being developed for portable scanning electron microscope.For column miniaturization and high-precision lens fabrication, we have developed a ceramic lens integrated column system, in which all of the electrooptical elements are integrated in one cylindrical ceramic body.In this trial production, we use a newly developed alumina-based high-resistive ceramic for the optimization of this electrostatic lens operation and ceramic micromachining technique for precise lens manufacturing. From the evaluation of the secondary electron images, the concept has been proved feasible.On the basis of this ceramic lens integrated column, a prototype of portable SEM is constructed.

Journal

• Oyo Buturi

  Oyo Buturi 73 (4), 476-480, 2004-04-10

  The Japan Society of Applied Physics

Keywords

• scanning electron microscope
• electro-optical system
• electrostatic lens
• conductive ceramics
• micro-machining
• secondary electron image

Details

• CRID: 1390845702288965248
• NII Article ID: 10012857423
• NII Book ID: AN00026679
• DOI: 10.11470/oubutsu.73.4_476
• ISSN: 21882290
• ISSN: 03698009
• NDL BIB ID: 6911489
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6911489
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
• Abstract License Flag: Disallowed