原料の異なるDLC膜のトライボロジー特性 Tribological Properties of DLC Films Prepared from Different Raw Materials

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著者

    • 鈴木 雅裕 SUZUKI Masahiro
    • (独)産業技術総合研究所 新炭素系材料開発研究センター Research Center for Advanced Carbon Materials, National Institute of Advanced Industrial Science and Technology (AIST)
    • 広中 清一郎 HIRONAKA Seiichiro
    • 東京都立科学技術大学大学院システム基礎工学専攻 Department of Systems Engineering Science, Tokyo Metropolitan Institute of Technology
    • 野老山 貴行 TOKOROYAMA Takayuki
    • 東京都立科学技術大学大学院システム基礎工学専攻 Department of Systems Engineering Science, Tokyo Metropolitan Institute of Technology
    • 田中 章浩 TANAKA Akihiro
    • (独)産業技術総合研究所 新炭素系材料開発研究センター Research Center for Advanced Carbon Materials, National Institute of Advanced Industrial Science and Technology (AIST)

抄録

The diamond-like carbon (DLC) films were prepared from methane, benzene and toluene by thermal electron exited plasma CVD method. Micro-laser Raman analysis of three films showed a typical spectrum of DLC film. The hardness and hydrogen content of the film were 11−25 GPa and 23−29 at%, respectively. The tribological properties of three DLC films were investigated using a scratch tester, a Bowden-Leben type friction tester and a ball-on-disk type reciprocating friction tester. The effects of raw materials on the tribological properties were confirmed. The difference in tribological properties of these three films seems to be related with their hardness. That is, the friction coefficient of the DLC film with low hardness was lower than that of the film with high hardness. On the other hand, when the hardness was increased, the specific wear rate of the DLC films appeared to decrease. The transferred films formed on mating material surfaces are supposed to play significant roles in the tribological properties of the DLC films.

収録刊行物

  • 表面科学 = Journal of The Surface Science Society of Japan

    表面科学 = Journal of The Surface Science Society of Japan 25(4), 232-237, 2004-04-10

    The Surface Science Society of Japan

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各種コード

  • NII論文ID(NAID)
    10012860730
  • NII書誌ID(NCID)
    AN00334149
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03885321
  • NDL 記事登録ID
    6919690
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-379
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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