高強度低合金チタンにおけるガス放出速度のベーキング温度・ベーキング時間依存性 Baking Effect for Outgassing Rate of Titanium Alloy

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著者

    • 村中 武 MURANAKA Takeshi
    • 山口大学工学部機能材料工学科 Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
    • 栗巣 普揮 KURISU Hiroki
    • 山口大学工学部機能材料工学科 Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
    • 山本 節夫 YAMAMOTO Setsuo
    • 山口大学工学部機能材料工学科 Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
    • 松浦 満 MATSUURA Mitsuru
    • 山口大学工学部機能材料工学科 Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University

抄録

We have investigated the pre-baking effect for the outgassing property of a titanium alloy. The outgassing rate of the order of 10<SUP>-12</SUP> Pa · m · s<SUP>-1</SUP> is obtained after the modest baking condition, e.g. 100°C × 3 h. This value is lower than that of standard vacuum materials by two orders of magnitude after the ordinary baking condition, e.g. 180°C ×48 h. From the Arrhenius plots of the outgassing rate after the baking at 150°C × 20 h, the activation energy <I>Eq</I> for the outgassing is 0.45 eV. This value is smaller than that for the hydrogen diffusion dissolved in bulk titanium. It is interpreted that the very low hydrogen content occurs at the surface oxide layer by the modest pre-baking treatment.

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 116-119, 2004-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10012866957
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6929281
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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