2種類の圧力計による大気圧O_2/O_3混合ガスのO_3濃度計測 Ozone Concentration Measurement of O_2-O_3 Binary Gas with Two Types of Pressure Gauges
A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O<SUB>3</SUB>/O<SUB>2</SUB>gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of<I>Δ</I> <I>Cozone</I> = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at <I>Δ</I> <I>Cozone</I>=0.05 vol%.
- 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN
真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 151-154, 2004-03-20
The Vacuum Society of Japan