磁場印加型高周波マグネトロンスパッタ法によるBi系超伝導薄膜の作製 Preparation of Bi-based Superconducting Thin Films by RF Magnetron Sputtering under Magnetic Field
Crystallizations under magnetic field have being flourished. Using rf magnetron sputtering method under high magnetic field we formed Bi<SUB>2</SUB>Sr<SUB>2</SUB>Ca<SUB>n-1</SUB>Cu<SUB>n</SUB>O<SUB>y</SUB> (Bi-based) superconducting thin films. Some of the deposited films showed zero resistance. Oxidization of films may be accelerated by applying magnetic field.
- 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN
真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 194-196, 2004-03-20
The Vacuum Society of Japan