セラミックスナノ積層多層薄膜の合成と機械特性

• 櫻井 篤士

  龍谷大学大学院理工学研究科

• 青井 芳史

  龍谷大学理工学部

• 上條 栄治

  龍谷大学理工学部

書誌事項

タイトル別名

• Synthesis and Mechanical Properties of Nano-Ceramics Multilayer Thin Films
• セラミックス ナノ セキソウ タソウ ハクマク ノ ゴウセイ ト キカイ トクセイ

抄録

TiN/BN ceramics multilayer films were deposited on Si (100) substrates by ion beam sputtering (IBS) under various deposition conditions. The deposited multilayer films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), Knoop hardness, and Multi-Beam-Optical Sensor (MOS). Internal stress of the multilayer thin films were changed by the multilayer periods (λ). Maximum hardness and internal stress of the multilayer thin films were observed at λ= 1530 nm. The enhancement effect in hardness and internal stress may be presumed the strain generation due to lattice stress at the interface between alternate ceramic thin films.

収録刊行物

• 真空

  真空 47 (3), 197-199, 2004

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679039932032
• NII論文ID: 10012867137
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.47.197
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 6930022
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6930022
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可