真空アーク蒸着法によるダイヤモンド様炭素成膜における巨視的プロセス特性の陰極素材依存性 Cathode Material Dependence on Macroscopic Process Properties in DLC Film Preparation using Filtered Cathodic Arc Deposition

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Macroscopic process parameters of arc voltage, cathode erosion rate, droplet emission rate, ion current, and deposition rate were measured in T-shape filtered cathodic arc deposition using various kinds of carbon cathode materials. Strong correlation between deposition rate and ion current was found. When the ion current was higher, the deposition rate was higher. However, the higher cathode erosion rate did not always brought the higher ion current, and the droplet emission rate was mildly tended to increase as the ion current increased. As a comprehensive evaluation, the optimum cathode material in the present study was considered to be pure graphite. However, the materials of carbon graphite and that including Si hardly emitted the droplets, suggesting the future possibility of the development of droplet-free carbon cathode material.

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 200-203, 2004-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10012867147
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6930028
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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