マイクロガスジェットイオン源の放電特性把握実験 Discharge Characteristics of Micro Gas Jet Ion Source

この論文にアクセスする

この論文をさがす

著者

    • 小林 明 KOBAYASHI Akira
    • 株式会社神戸製鋼所技術開発本部電子技術研究所 Electronics Research Laboratory, Kobe Steel. Ltd.
    • 辻 博司 TSUJI Hiroshi
    • 京都大学大学院工学研究科電子物性工学専攻 Department of Electronic Science and Engineering, Kyoto University
    • 石川 順三 ISHIKAWA Junzo
    • 京都大学大学院工学研究科電子物性工学専攻 Department of Electronic Science and Engineering, Kyoto University

抄録

A new type of ion source, micro gas jet (MGJ) ion source, was proposed, which can achieve high transport efficiency in the beam focusing optics system with a very small ion beam at the starting point. The MGJ ion source consists of an anode, a cathode, and an extractor. The anode has a micro aperture as a material gas inlet, and separates between a high pressure and a high vacuum areas. The material gas jet going out from the aperture is ionized by DC voltage applied between the anode and the cathode, and then extracted by an extraction voltage. We reported experimental results on the discharge phenomena in the vicinity of the micro aperture. A relationship was found between the threshold voltage for the discharge in the inhomogeneous pressure region and effective <I>pd</I> (where <I>p</I> is the pressure, <I>d</I> is the distance between electrodes), which was not just <I>pd</I>, like <I>Pashen's</I> law.

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 285-288, 2004-03-20

    The Vacuum Society of Japan

参考文献:  3件中 1-3件 を表示

  • <no title>

    石川順三

    イオン源工学, 1986

    被引用文献10件

  • <no title>

    後藤康仁

    第44回真空に関する連合講演会予稿集, 東京, 2003 107, 2003

    被引用文献1件

  • <no title>

    裏克己

    電子 イオンビーム光学, 1994

    被引用文献3件

各種コード

  • NII論文ID(NAID)
    10012867336
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6930246
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ