Electron holographic mapping of two-dimensional doping areas in cross-sectional device specimens prepared by the lift-out technique based on a focused ion beam
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- WANG Zhou-Guang
- Japan Fine Ceramics Center
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- KATO Naoko
- Structural Analysis, International Test and Engineering Services Co. Ltd
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- SASAKI Katsuhiro
- Department of Quantum Engineering, Nagoya University
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- HIRAYAMA Tsukasa
- Japan Fine Ceramics Center
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- SAKA Hiroyasu
- Department of Quantum Engineering, Nagoya University
Search this article
Journal
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- J. Electron Microscopy
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J. Electron Microscopy 53 (2), 115-119, 2004-04-01
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Details
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- CRID
- 1574231874842002432
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- NII Article ID
- 10012932510
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- NII Book ID
- AA00697060
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- ISSN
- 00220744
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- Text Lang
- en
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- Data Source
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- CiNii Articles