Effects of Ultra Low Energy Nitrogen Ion Irradiation on Carbon Nanotube Channel Single-Electron Transistor

  • Kamimura Takafumi
    Univ. of Tsukuba CREST, Japan Science and Technology Agency
  • Yamamoto Kazuhiro
    CREST, Japan Science and Technology Agency National Institute of Advanced Industrial Science and Technology
  • Matsumoto Kazuhiko
    CREST, Japan Science and Technology Agency National Institute of Advanced Industrial Science and Technology Osaka Univ.

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Abstract

The effects of ultra low nitrogen ion irradiation on room-temperature-operated carbon nanotube channel single-electron transistor have been investigated. The ion irradiation energy was 30 eV and the total number of ions was 2.5×1014 ions/cm2 and 3.7×1015 ions/cm2. After the irradiation, the Coulomb diamonds became larger with increasing in density of irradiated ions. Nitrogen ion irradiation was found to be effective in reducing the quantum dots size in the carbon nanotube channel single-electron transistor.

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