Research of Chain Plasmochemical Synthesis of Superdispersed Silicon Dioxide by Pulsed Electron Beam

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The work covers the research results of plasmochemical synthesis of silicon dioxide nanosize powder out of the gas-phase mixture of silicon tetrachloride, hydrogen and oxygen. The process was initiated by the high-current pulsed electron beam. Chain plasmochemical synthesis was carried out at volumetric reaction excitation. Distribution of the particles under size criteria was shown. Particle growth under further influence of pulsed electron beam was discovered. It is shown that the process has an oscillation character similar to cold flame regime at hydrocarbon oxidation

収録刊行物

  • 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

    電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 124(6), 483-486, 2004-06-01

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10013069308
  • NII書誌ID(NCID)
    AN10136312
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    03854205
  • NDL 記事登録ID
    6973416
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-793
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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