Ti-Al, Graded Al/AlTi, and Ti-Al-N Coatings Prepared by Supersonic Free-Jet PVD

  • Yumoto Atsushi
    Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University
  • Yamamoto Takahisa
    Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo
  • Hiroki Fujio
    Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University
  • Shiota Ichiro
    Department of Materials Science and Technology, Faculty of Engineering, Kogakuin University
  • Niwa Naotake
    Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University

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Abstract

The authors previously developed Supersonic Free-Jet PVD (SFJ-PVD) as a new coating method in which a coating film is formed by depositing nanoparticles at very high velocity onto a substrate. This SFJ-PVD provides a rapid deposition rate and produces a mixture of different kinds of nanoparticles formed in different evaporation chambers on the substrate. This paper describes the preparation of graded Al/AlTi, Ti-Al, and Ti-Al-N coating films with SFJ-PVD. Ti-50 at%Al film and graded Al/AlTi film are produced by depositing Al and Ti nanoparticles formed in different evaporation chambers with the controlled evaporation rates of Al and Ti. Ti-Al-N film is produced by depositing nanoparticles formed in the evaporation chamber with a controlled partial pressure of N2 in an atmosphere of He. Mixing Ti and Al nanoparticles by depositing them onto a substrate produces in-situ syntheses of γ-TiAl and α2-Ti3Al intermetallic compounds on the substrate regardless of the substrate temperature in these experimental conditions. A smooth, compact, and defect-free structure is formed both at the interface between the substrate and the coating films and inside the coating films. XRD analysis reveals the crystal structure of the Ti-Al-N film to be TiN, Ti3Al2N2, Ti3AlN, and AlN.

Journal

  • MATERIALS TRANSACTIONS

    MATERIALS TRANSACTIONS 45 (5), 1620-1623, 2004

    The Japan Institute of Metals and Materials

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