Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroactive Polymers (特集:ユビキタス時代のMEMS) Silicon to Silicone : Stretching the Capabilities of Micromachines with Electroactive Polymers

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Electroactive polymer transducers have many features that are desirable for MEMS devices. An especially attractive type of electroactive polymer is dielectric elastomer. Dielectric elastomers, transducers that couple the deformation of a rubbery polymer film to an applied electric field, show particular promise with features such as simple fabrication in a variety of size scales, high strain and energy density, high efficiency and fast speed of response, and inherent flexibility, environmental tolerance, and ruggedness. A variety of actuator configurations has been demonstrated at the small size scales needed for MEMS devices, including rolled “artificial muscle" actuators, framed and bending beam actuators for efficient opto-mechanical switches, and diaphragm and thickness mode actuators for pumps and valves. The performance benefits of electroactive polymers can allow for new generations of devices in microrobotics, communications, and biotechnology. Several challenges remain for electroactive polymers, including microfabrication, integration with driving electronics, and operational lifetime.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 124(8), 266-271, 2004-08-01

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10013324839
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    7051908
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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