Manufacture of 27 GB Read-Only-Memory Disc Using Deep-UV Beam Recorder with Two-Dimensional Optical Compensation
A novel mastering method using a deep-UV laser beam recorder (LBR) with two-dimensional optical compensation has been proposed. Using this technique, uniform fine pits can be created. The result reveals that a 27 GB read-only-memory (ROM) disc can be realized. The bottom jitter with a limit equalizer was 7.5%.
- Japanese journal of applied physics. Pt. 1, Regular papers & short notes
Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(7B), 5042-5043, 2004-07-15
INSTITUTE OF PURE AND APPLIED PHYSICS