Spectroscopic Study on Vibrational Nonequilibrium of a Microwave Discharge Nitrogen Plasma

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  • Koike Shuji
    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology
  • Sakamoto Takeshi
    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology
  • Kobori Hiroyuki
    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology
  • Matsuura Haruaki
    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology
  • Akatsuka Hiroshi
    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology

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We generate a microwave discharge nitrogen plasma using a rectangular waveguide and a quartz tube (30 mm i.d.) inserted along the vector of the electric field, with an adjustable short-circuited plunger. The typical discharge conditions used are as follows: microwave frequency 2.45 GHz, input power 550 W, nitrogen (99.5%) gas flow rate 0.01–1.6 l/min, and discharge pressure p=0.5–10 Torr. Electron temperature Te, and density ne are measured using a double probe. Vibrational temperature Tv is obtained from the population density of the vibrational exited states of N2 C 3Πu by spectroscopic examination. Rotational temperature Tr is obtained from a comparison of the rovibronic spectra observed experimentally with the calculated ones. It is found that Te\\simeq0.5–2 eV, Tv\\simeq0.45–1 eV, and Tr\\simeq0.06–0.1 eV under the present pressure conditions, whereas ne\\simeq1011–1012 cm−3 at a low discharge pressure, and ne\\simeq108–109 cm−3 at a high discharge pressure. We discuss the measured vibrational populations by theoretical calculations in which the variation in their number density is expressed in terms of molecular processes in the nitrogen plasma.

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