New trend in silicon MEMS

• ESASHI Masayoshi

  New Industry Creation Hatchery Center, Tohoku University

Bibliographic Information

Other Title

• シリコンMEMSの新潮流
• シリコン MEMS ノ シン チョウリュウ

Abstract

MEMS (Micro-Electro-Mechanical System) is a technology for fabricating value-added system devices on silicon chips. Micromachining which is an extended integrated circuit technology is used for fabrication. A rotational gyroscope which has an electrostatically levitated ring rotor was developed for inertia sensing. Array MEMS for multiprobe data storage and multicolumn electron beam lithography can take advantage of photolithography. RF MEMS such as on-chip filter and relay plays important roles in wireless equipment. Micro- and nano-probes have extreme sensitivity and space resolution. New processes and an efficient environment for development and prototyping of MEMS are required to be applied widely in market.

Journal

• Oyo Buturi

  Oyo Buturi 73 (9), 1158-1165, 2004-09-10

  The Japan Society of Applied Physics

Keywords

• MEMS
• micromachining
• data storage
• gyroscope
• packaging
• field emitter
• sensor
• actuator
• molding

Details

• CRID: 1390845702290677504
• NII Article ID: 10013536437
• NII Book ID: AN00026679
• DOI: 10.11470/oubutsu.73.9_1158
• ISSN: 21882290
• ISSN: 03698009
• NDL BIB ID: 7081638
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7081638
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
• Abstract License Flag: Disallowed