Analysis of Desorbed Gases from an Insulator Excited by Electron Impact

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Gas desorption from an insulator excited by electron impact is regarded as one of major causes of surface flashover in vacuum. To enable analysis of gases only from an electron emission site on insulator surface a liquid nitrogen cooled shroud was used to prevent gases from a vacuum chamber entering into a quadrupole mass spectrometer (QMS). We observed gases released from the alumina sample and found that their mass numbers were m/e=2 (main), 18 and 28(very few). It was found that they were same components as residual gas species of a vacuum chamber. Furthermore, we investigated the effect of heat treatment on the desorbed gases from alumina.

収録刊行物

  • 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

    電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 124(9), 779-784, 2004-09-01

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10013539082
  • NII書誌ID(NCID)
    AN10136312
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    03854205
  • NDL 記事登録ID
    7076831
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-793
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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