Analysis of Desorbed Gases from an Insulator Excited by Electron Impact

• Nomura Atsushi

  Department of Electrical and Electronic Systems, Saitama University

• Yamano Yasushi

  Department of Electrical and Electronic Systems, Saitama University

• Kobayashi Shinichi

  Department of Electrical and Electronic Systems, Saitama University

• Tumiran

  Department of Electrical Engneering, Gadjahmada University

• Saito Yoshio

  KEK-High Energy Accelerator Research Organization

抄録

Gas desorption from an insulator excited by electron impact is regarded as one of major causes of surface flashover in vacuum. To enable analysis of gases only from an electron emission site on insulator surface a liquid nitrogen cooled shroud was used to prevent gases from a vacuum chamber entering into a quadrupole mass spectrometer (QMS). We observed gases released from the alumina sample and found that their mass numbers were m/e=2 (main), 18 and 28(very few). It was found that they were same components as residual gas species of a vacuum chamber. Furthermore, we investigated the effect of heat treatment on the desorbed gases from alumina.

収録刊行物

• 電気学会論文誌．　Ａ

  電気学会論文誌．　Ａ 124 (9), 779-784, 2004

  一般社団法人 電気学会

キーワード

• Vacuum
• Alumina
• Quadrupole mass spectrometer
• Desorbed gas surface flashover in vacuum

詳細情報

• CRID: 1390001204593189888
• NII論文ID: 10013539082
• NII書誌ID: AN10136312
• DOI: 10.1541/ieejfms.124.779
• ISSN: 13475533
• ISSN: 03854205
• NDL書誌ID: 7076831
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7076831
• Web Site: http://www.jstage.jst.go.jp/article/ieejfms/124/9/124_9_779/_pdf
• 本文言語コード: en
• データソース種別:
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