# Ion-Induced Secondary Electron Emission Coefficient ($\gamma$) from MgO Protective Layer with Microscopic Surface Structures in Alternating Current Plasma Display Panels

## 抄録

We have investigated the influence of microscopic surface structures of the MgO protective layer on the ion-induced secondary electron emission coefficient in alternating-current plasma display panels (AC-PDPs). The microscopic surface structures of the MgO protective layer have been formed by using a mesh mask with an electron beam evaporation method. The ion-induced secondary electron emission coefficient $\gamma$ of the MgO protective layer with mesh-patterned microscopic surface structures has been measured by the $\gamma$-FIB (focused ion beam) system. It is found that the MgO protective layer with microscopic surface structures has a higher $\gamma$ than those without any surface structures.

## 収録刊行物

• Japanese journal of applied physics. Pt. 2, Letters

Japanese journal of applied physics. Pt. 2, Letters 43(9A/B), L1154-L1155, 2004-09-15

Japan Society of Applied Physics

## 各種コード

• NII論文ID(NAID)
10013572703
• NII書誌ID(NCID)
AA10650595
• 本文言語コード
EN
• 資料種別
SHO
• ISSN
0021-4922
• NDL 記事登録ID
7079436
• NDL 雑誌分類
ZM35(科学技術--物理学)
• NDL 請求記号
Z54-J337
• データ提供元
CJP書誌  NDL  JSAP

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