Fluid Dynamic Assembly of Semiconductor Blocks for Heterogeneous Integration

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We have studied the fluidic assembly (FA) technique for heterogeneous integration. In this technique, device blocks, the size of which ranges from a few tens of microns to a few hundreds of microns, are arranged onto another material substrate in fluid. Here, we propose a novel technique to improve FA, called fluid dynamic assembly (FDA), which employs fluid dynamic effects. In the FDA, a special structure is fabricated on the block, which stabilizes the posture of the blocks falling in the fluid. This can be used to control the face of assembled blocks. In this paper, the feasibility of the FDA is discussed on the basis of fluid dynamic simulation and experiments. The numerical simulations revealed that the face control can be carried out for the block having ringlike (O-type) structures on it. Then we carried out the FDA experiments using thin disk-shaped GaAs blocks with O-type structure, and demonstrated an 87% face control ratio for the blocks with 7.5-μm-thick structure. Moreover, the less symmetric C-type structure was examined, and demonstrated even a high face control ratio of 96%.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(9A), 5951-5954, 2004-09-15

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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被引用文献:  3件中 1-3件 を表示

各種コード

  • NII論文ID(NAID)
    10013573129
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7079048
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE  JSAP 
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