High-Resolution Imaging of Recording Marks on Phase-Change Film by Lateral Force Microscopy
Recording marks on a phase-change optical disk were observed by lateral force microscopy (LFM), and the images were compared with those obtained by Kelvin force microscopy (KFM). The spatial resolution of LFM was considerably better than that of KFM. Therefore it is expected that LFM will become one of the effective techniques for evaluating the shapes of recording marks in next-generation phase-change optical disks.
- Japanese journal of applied physics. Pt. 1, Regular papers & short notes
Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(9A), 6356-6357, 2004-09-15