High-Resolution Imaging of Recording Marks on Phase-Change Film by Lateral Force Microscopy

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著者

    • Ishiyama Osamu
    • Characterization Technology Group, Matsushita Technoresearch, Inc., 3-1-1 Yagumo-naka-machi, Moriguchi City, Osaka 570-8501, Japan

抄録

Recording marks on a phase-change optical disk were observed by lateral force microscopy (LFM), and the images were compared with those obtained by Kelvin force microscopy (KFM). The spatial resolution of LFM was considerably better than that of KFM. Therefore it is expected that LFM will become one of the effective techniques for evaluating the shapes of recording marks in next-generation phase-change optical disks.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(9A), 6356-6357, 2004-09-15

    INSTITUTE OF PURE AND APPLIED PHYSICS

参考文献:  5件中 1-5件 を表示

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    Proc. 11th Symp. Phase Change Optical Information Storage, 1999 52, 1999

    被引用文献1件

  • <no title>

    MIZOGUCHI E.

    Proc. 14th Symp. Phase Change Optical Information Storage, 2002 52, 2002

    被引用文献1件

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    Jpn. J. Appl. Phys. 39, 3599, 2000

    被引用文献1件

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    YAMAGUCHI M.

    Jpn. J. Appl. Phys. 40, 1578, 2001

    被引用文献1件

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    被引用文献1件

各種コード

  • NII論文ID(NAID)
    10013574488
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • データ提供元
    CJP書誌  J-STAGE  JSAP 
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