Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes

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著者

    • Shimamura Toshishige
    • NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Yamaguchi Joji
    • NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Kamei Toshikazu
    • NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Kudou Kazuhisa
    • NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Yano Masaki
    • NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Uenishi Yuji
    • NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    • Machida Katsuyuki
    • NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

抄録

This work describes a practical and high-yield method of fabricating optical microelectromechanical-system (MEMS) switches. The method features the use of thick-plated gold multilevel interconnections for the mirror-drive electrodes and polyimide coating to protect the fragile and easily-movable micromachined mirror. The multilevel electrode developed was over 80-μm high providing enough space for the tilting mirror placed above it. Open-short circuit yield was 100% on 6-inch wafers. All the processes for fabricating the electrodes were carried out at under 310°C, meaning the electrodes could be successively formed after mirror-control large-scale integrated circuits (LSIs) were fabricated on a wafer. The fragile mirrors are sealed in polyimide during the fabrication processes. As this method protects the mirrors against the shock and damage caused by factors such as the dicing process, it enables 3-dimensional MEMS structures that have moving portions to be handled through conventional fabrication processes without the need for any special care. The static and dynamic characteristics of the optical MEMS switches fabricated are shown.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(9A), 6468-6472, 2004-09-15

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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各種コード

  • NII論文ID(NAID)
    10013574844
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7080269
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE  JSAP 
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