ポリマー多層膜光素子 Optical Devices Using Polymeric Multi-Layers

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High-reflection multi-layered mirrors have ever been fabricated using inorganic dielectric materials. Their fabrication methods are almost all based on vacuum evaporation or sputtering. On the other hand, polymeric thin-films such as photo-resists can be easily obtained by spin coating. In this study, we report the results of fabrication of the multi-layered mirrors by spin coating of two different polymers. Optical thickness of layers for λ/4 was controlled by adjusting concentration of solutions and by changing rotation speed of spin coating. Simple repetitive-processes of spin coating and drying solvents yielded reflectivity higher than 99 % at a wavelength of 633 nm after stacking 49 layers. We also report possible applications for novel photonic-devices using polymeric high-reflection multi-layered mirrors or all-polymeric functional devices.

収録刊行物

  • レーザー研究

    レーザー研究 32(9), 586-590, 2004-09-15

    一般社団法人 レーザー学会

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各種コード

  • NII論文ID(NAID)
    10013577885
  • NII書誌ID(NCID)
    AN00255326
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    03870200
  • NDL 記事登録ID
    7096773
  • NDL 雑誌分類
    ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
  • NDL 請求記号
    Z16-1040
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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