Optimization of Thickness Uniformity in Electrodeposition onto a Patterned Substrate

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抄録

A numerical simulation based on the finite element method was used to obtain the optimal electrodeposition condition at a patterned cathode. The calculated deposition rates agreed well with the measured ones. Influences of the following parameters on uniformity of electrodeposit have been studied; width of auxiliary electrode, gap between cathode and auxiliary electrode, distance between the inner wall of bath and auxiliary electrode, shape of auxiliary electrode, paddle velocity, gap between cathodes and paddles, anode size.

収録刊行物

  • Materials transactions

    Materials transactions 45(10), 3005-3010, 2004-10-20

    公益社団法人 日本金属学会

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各種コード

  • NII論文ID(NAID)
    10013717096
  • NII書誌ID(NCID)
    AA1151294X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13459678
  • NDL 記事登録ID
    7127617
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z53-J286
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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