Measurement of the Active Species Density for the Synthesis of Amorphous Carbon Nitrides I. Metastable Atoms and Electrons in the Microwave Discharge Flow of Ar

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  • Measurement of the Active Species Density for the Synthesis of Amorphous Carbon Nitrides 1. Metastable Atoms and Electrons in the Microwave Discharge Flow of Ar

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Abstract

The densities of Ar(3P2) metastable atoms and free electrons produced in the microwave (MW) discharge flow of Ar were measured. The 3P1–3P2 (λ=696.5 nm) and 3P2–3P2 (λ=706.7 nm) transitions of Ar were observed by laser-induced fluorescence (LIF) spectroscopy. The LIF intensities were calibrated against Rayleigh scattering intensity by Ar atoms. The electron density was measured by a single-probe method. The number densities of Ar(3P2) atoms and electrons were determined to be (4.05±0.05)×1014 m−3 and (8.5±1.5)×1015 m−3, respectively, under the condition of PAr=0.1 Torr, where PAr denotes Ar pressure. When BrCN was introduced into the reaction system, the Ar(3P2) density became negligibly small, and the electron density was reduced to (2.0±0.8)×1015 m−3. On the basis of these observations, the decomposition process of BrCN in the MW discharge flow of Ar is discussed.

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