Surface flattening of metal layer by oxygen-additive sputtering method and its effect on TMR properties of magnetic tunnel junctions

• YOSHIMURA S.

  Tohoku Univ.

• SHOYAMA T.

  Tohoku Univ.

• NOZAWA T.

  Tohoku Univ.

• TSUNODA M.

  Tohoku Univ.

• TAKAHASHI M.

  Tohoku Univ.

Bibliographic Information

Other Title

• 酸素添加成膜法による金属膜の平坦化とそれによるトンネル接合膜のTMR特性の改善

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 28 116-, 2004-09-21

Details

• CRID: 1572543024953276800
• NII Article ID: 10013768979
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles