Characterization of Wurtzite Zn1-xCdxO Films Using Remote Plasma-Enhanced Metalorganic Chemical Vapor Deposition

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著者

    • Yamamoto Kenji
    • Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan
    • Aoki Toru
    • Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan
    • Gotoh Hideki
    • NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato-Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
    • Temmyo Jiro
    • Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan

抄録

The optical properties of wurtzite Zn1-xCdxO films were investigated. The films were grown on ($11\bar{2}0$) $a$-plane sapphire substrates by remote plasma enhanced metalorganic chemical vapor deposition (RPE-MOCVD) and a characterized by X-ray diffraction, photoluminescence (PL), ultraviolet/visible/near-infrared (UV/VIS/NIR) optical transmission spectroscopy and Hall measurement. The content ratio of the films was controlled by changing the molar ratio of diethyl zinc (DEZn) to dimethyl cadmium (DMCd). The optical band gap of the films at nearly 3.28 eV was shifted by alloying with Cd down to 1.85 eV depending on the alloy composition. The evolution of the PL lineshape was studied as a function of temperature. The activation energy of the films calculated from the variation of the PL peak intensity was as large as the binding energy of ZnO. In addition, the films showed a large Stokes shift at room temperature, which is discussed in terms of the localization of excitons in a ternary alloy.

収録刊行物

  • Japanese journal of applied physics. Pt. 2, Letters

    Japanese journal of applied physics. Pt. 2, Letters 43(11A), L1452-L1454, 2004-11-01

    Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10013787485
  • NII書誌ID(NCID)
    AA10650595
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7146832
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z54-J337
  • データ提供元
    CJP書誌  NDL  J-STAGE  JSAP 
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