Observation of Element-Specific Energy-Filtered X-Ray Photoemission Electron Microscopy Images of Au on Ta Using a Wien Filter Type Energy Analyzer

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Abstract

We have shown the possibility of a Wien filter as an energy analyzer for the energy-filtered X-ray photoemission electron microscopy (EXPEEM) by obtaining images of Au islands on a Ta substrate using an inner shell photoelectron excited by an X-ray with a photon energy of 2300 eV. When the photoelectron with kinetic energy of nearly 0 eV was selected, brighter Au islands were observed. When the kinetic energies of photoelectrons passing the Wien filter are set at those of Au 3d<SUB>5⁄2</SUB> and Ta 3p<SUB>3⁄2</SUB> photoelectrons, the Au and Ta regions appeared brighter, respectively, indicating that the chemical imaging was successful using a high energy X-ray and a Wien filter energy analyzer.

Journal

  • Japanese Journal of Applied Physics

    Japanese Journal of Applied Physics 43(11), 7682-7688, 2004-11-15

    The Japan Society of Applied Physics

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Codes

  • NII Article ID (NAID)
    10014030784
  • NII NACSIS-CAT ID (NCID)
    AA10457675
  • Text Lang
    ENG
  • Article Type
    ART
  • Journal Type
    大学紀要
  • ISSN
    00214922
  • NDL Article ID
    7154824
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z53-A375
  • Data Source
    CJP  NDL  J-STAGE  Crossref 
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