A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam

• KATO Takeharu

  Materials R&D Laboratory, Japan Fine Ceramics Center

• MUROGA Takemi

  Superconductivity Research Laboratory, Nagoya Coated Conductor Center, International Superconductivity Technology Center

• IIJIMA Yasuhiro

  Material Technology Laboratory, Fujikura Ltd

• SAITOH Takashi

  Material Technology Laboratory, Fujikura Ltd

• YAMADA Yutaka

  Superconductivity Research Laboratory, Nagoya Coated Conductor Center, International Superconductivity Technology Center

• IZUMI Teruo

  Superconductivity Research Laboratory, Division of Superconducting Tapes and Wires, International Superconductivity Technology Center

• SHIOHARA Yuh

  Superconductivity Research Laboratory, Nagoya Coated Conductor Center, International Superconductivity Technology Center

• HIRAYAMA Tsukasa

  Materials R&D Laboratory, Japan Fine Ceramics Center

• IKUHARA Yuichi

  Materials R&D Laboratory, Japan Fine Ceramics Center

収録刊行物

• Journal of electron microscopy

  Journal of electron microscopy 53 (5), 501-504, 2004-10-01

キーワード

• plan-view observation
• in-plane alignment
• multilayer
• focused ion beam
• PLD-CeO_2
• IBAD-Gd_2Zr_2O_7

詳細情報

• CRID: 1573387449721321728
• NII論文ID: 10014104151
• NII書誌ID: AA00697060
• ISSN: 00220744
• 本文言語コード: en
• データソース種別:
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