A method for multidirectional TEM observation of a specific site at atomic resolution

• KAMINO Takeo

  Hitachi Science Systems, Ltd.

• YAGUCHI Toshie

  Hitachi Science Systems, Ltd.

• KONNO Mitsuru

  Hitachi Science Systems, Ltd.

• OHNISHI Tsuyoshi

  Hitachi High-Technologies Corp.

• ISHITANI Tohru

  Hitachi High-Technologies Corp.

Journal

• Journal of Electron Microscopy

  Journal of Electron Microscopy 53 (6), 583-588, 2004-12-01

Keywords

• three-dimensional structure characterisation
• focused ion beam
• FIB micro-sampling technique
• high-resolution transmission electron microscopy
• crystal lattice fringe
• Si single crystal

Details

• CRID: 1572261549801627520
• NII Article ID: 10014320442
• NII Book ID: AA00697060
• ISSN: 00220744
• Text Lang: en
• Data Source:
  • CiNii Articles