Growth of mm-Long Carbon Nanotubes by Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition

• Kishimoto Shigeru

  Department of Quantum Engineering, Nagoya University

• Kojima Yoshihiro

  Department of Quantum Engineering, Nagoya University

• Ohno Yutaka

  Department of Quantum Engineering, Nagoya University

• Sugai Toshiki

  Department of Chemistry, Nagoya University

• Shinohara Hisanori

  Department of Chemistry, Nagoya University

• Mizutani Takashi

  Department of Quantum Engineering, Nagoya University

Abstract

Vertically aligned long multi-walled carbon nanotubes (MWNTs) have been successfully grown by grid-inserted plasma-enhanced chemical vapor deposition (PECVD). A thin Fe (1 nm)/Ti (1 nm) double-layer catalyst was effective in growing the long MWNTs. The length of the MWNTs increased to 1 mm for the growth time of 120 min without growth termination. A thick Fe catalyst or thick Ti underlayer resulted in a low growth rate. Transmission electron microscopy, energy-dispersive X-ray analysis and thermo-gravimetric analysis (TGA) measurements suggest that the MWNTs were grown in a root growth mode. Moreover, the TGA measurements suggest that MWNTs of high quality/purity were successfully grown by grid-inserted PECVD with a double-layer catalyst.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (4A), 1554-1557, 2005

  The Japan Society of Applied Physics

Keywords

• long nanotube
• plasma-enhanced chemical vapor deposition
• grid-inserted plasma CVD
• double-layer catalyst
• thermo-gravimetric analysis

Details

• CRID: 1390001206264262912
• NII Article ID: 10015469509
• NII Article ID: 130004533639
• NII Article ID: 210000057531
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.44.1554
• ISSN: 13474065
• ISSN: 00214922
• NDL BIB ID: 7302032
• Web Site: http://id.ndl.go.jp/bib/7302032
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7302032
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.1554
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.1554/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed