Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator

• Ono Takahito

  Graduate School of Engineering, Tohoku University

• Iwami Kentaro

  Graduate School of Engineering, Tohoku University

• Esashi Masayoshi

  New Industry Creation Hatchery Center, Tohoku University

Abstract

A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (12-15), L445-L448, 2005

  The Japan Society of Applied Physics

Keywords

• bow-tie antenna
• scanning near-field optical microscopy
• micro-electro-mechanical systems
• electrostatic actuator
• surface plasmon

Details

• CRID: 1390282681241987200
• NII Article ID: 210000059541
• NII Article ID: 10015474212
• NII Book ID: AA11906093
• DOI: 10.1143/jjap.44.l445
• ISSN: 13474065
• ISSN: 00214922
• NDL BIB ID: 7299173
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7299173
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.L445
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.L445/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed