Development of the 3-axis Angular Velocity Sensor Using a Piezoelectric Element

• Okada Kazuhiro

  WACOH Corporation

• Kakutani Tetsuya

  WACOH Corporation

• Matsu Yoshiyuki

  WACOH Corporation

抄録

Operation of objects in 3-dimensional space can be expressed in terms of acceleration and angular velocity. Sensors to detect them are made by using micro-machining technology and ceramic technology. In the field of acceleration sensors, 3-axis acceleration sensors that detect acceleration in 3-dimensional space have already been marketed, and in the field of angular velocity sensors, piezoelectric 2-axis angular velocity sensors have been developed. By applying such piezoelectric 2-axis angular velocity sensors, 3-axis angular velocity can be detected with the vibrator's velocity components in the directions of two axes, and the detection components of Coriolis force produced by angular velocity in the directions of two axes. By using this principle, we have succeeded in developing a 3-axis angular velocity sensor that detects 3-axis angular velocity with one detecting element. This report details the construction, detection principle, and detection circuit of the sensor, as well as the performance, including sensitivity, cross-axis sensitivity, and linearity.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 125 (6), 272-277, 2005

  一般社団法人 電気学会

キーワード

• 3-axis
• angular velocity
• piezoelectric
• Coriolis force

詳細情報

• CRID: 1390001204459995392
• NII論文ID: 10015671736
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.125.272
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 7385081
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7385081
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/125/6/125_6_272/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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• 抄録ライセンスフラグ: 使用不可