Fabrication of Zn-Indiffused LiNbO3 Optical Waveguides Using ZnS as Diffusion Source

• Senthil Selvan Jayaraman

  Department of Electronic Engineering, Graduate School of Engineering, Osaka University

• Fujimura Masatoshi

  Department of Electronic Engineering, Graduate School of Engineering, Osaka University

• Suhara Toshiaki

  Department of Electronic Engineering, Graduate School of Engineering, Osaka University

Bibliographic Information

Other Title

• Fabrication of Zn-Indiffused LiNbO₃ Optical Waveguides Using ZnS as Diffusion Source

Abstract

Fabrication of Zn-indiffused LiNbO₃ waveguides using ZnS as a diffusion source is proposed and demonstrated for the first time. Possibility of Zn diffusion into Z-cut LiNbO₃ using ZnS was examined. The diffusion in low-pressure atmosphere produced Zn-diffused crystals with a smooth surface. Single-mode waveguiding for transverse magnetic (TM) and transverse electric (TE) modes was achieved at 1.5 μm wavelength in the channel waveguides fabricated by the diffusion of ZnS film at 890°C for 30 min in oxygen at 1 Torr pressure.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (5A), 3075-3076, 2005

  The Japan Society of Applied Physics

Keywords

• lithium niobate
• waveguide
• Zn-indiffusion
• ZnS
• integrated optics

Details

• CRID: 1390282681242666496
• NII Article ID: 10015706625
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.44.3075
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.3075
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.3075/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed