A Decoupled Capacitance Measurement Technique for Characterization of Small-Geometry MOSFETs with Ultra-Thin Gate Oxides

• LIU Chuan-Hsi

  United Microelectronics Corp.

• LEE Ming T.

  United Microelectronics Corp.

• CHENG Yao-Chin

  United Microelectronics Corp.

• CHEN Jenkon

  United Microelectronics Corp.

収録刊行物

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2001 200-201, 2001-09-25

詳細情報

• CRID: 1570291225232559360
• NII論文ID: 10015752644
• NII書誌ID: AA10777858
• 本文言語コード: en
• データソース種別:
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