Atom Manipulation on Si and Ge Surfaces using Atomic Force Microscope

  • MORITA Seizo
    Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University Handai Frontier Research Center (Handai FRC)
  • SUGIMOTO Yoshiaki
    Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
  • OYABU Noriaki
    Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
  • CUSTANCE Óscar
    Handai Frontier Research Center (Handai FRC)
  • NISHI Ryuji
    Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University Science and Technology Center for Atoms, Molecules, and Ions Control (STAMIC), Graduate School of Engineering, Osaka University
  • SEINO Yoshihide
    Handai Frontier Research Center (Handai FRC)
  • YI In Sook
    Handai Frontier Research Center (Handai FRC)
  • ABE Masayuki
    Department of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University Handai Frontier Research Center (Handai FRC)

Bibliographic Information

Other Title
  • 原子間力顕微鏡によるSiとGe表面での原子操作
  • ゲンシカンリョク ケンビキョウ ニ ヨル Si ト Ge ヒョウメン デ ノ ゲンシ ソウサ

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Abstract

In this review article, at first, we introduced recent developments of powerful and sensitive atomic force microscope (AFM). Then, we introduced recent three topics related to AFM. The first one is an atom selective imaging of semiconductor surfaces with intermixed Si and Sn adatoms at room temperature (RT), i.e., chemical discrimination of two atom species on semiconductor surfaces at RT. The second one is vertical and lateral atom manipulations of semiconductor atoms based on the mechanical method at low temperature (LT). The last one is a novel atom manipulation method that enables us to create complex nanostructures assembled from more than two atom species at RT. Using this novel atom manipulation method, we constructed “Atom Inlay” at RT, i.e., atom letters “Sn” consisting of Sn atoms embedded in Ge atoms.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 26 (6), 351-356, 2005

    The Surface Science Society of Japan

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