Comparative Studies of Ultra Low-k Porous Silica Films with 2D-Hexagonal and Disordered Pore Structures

• FUJII N.

収録刊行物

• Proc. Mat. Res. Soc. 2004 Spring Meeting, 4

  Proc. Mat. Res. Soc. 2004 Spring Meeting, 4 812 43-48, 2004

詳細情報

• CRID: 1574231874980190976
• NII論文ID: 10016470702
• データソース種別:
  • CiNii Articles