Three-Dimensional Micro- and Nano-Fabrication in Transparent Materials by Femtosecond Laser

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  • Shimotsuma Yasuhiko
    Department of Material Chemistry, Graduate School of Engineering, Kyoto University
  • Hirao Kazuyuki
    Department of Material Chemistry, Graduate School of Engineering, Kyoto University
  • Kazansky Peter G.
    Optoelectronics Research Centre, University of Southampton
  • Qiu Jiarong
    Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency

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  • Three-dimensional micro- and nano-fabrication in transparent materials by femtsecond laser

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Abstract

Femtosecond pulsed lasers have been widely used for materials microprocessing. Due to their ultrashort pulse width and ultrahigh light intensity, the process is generally characterized by the nonthermal diffusion process. We observed various induced microstructures such as refractive-index-changed structures, color center defects, microvoids and microcracks in transparent materials (e.g., glasses after the femtosecond laser irradiation), and discussed the possible applications of the microstructures in the fabrication of various micro optical devices [e.g., optical waveguides, microgratings, microlenses, fiber attenuators, and three-dimensional (3D) optical memory]. In this paper, we review our recent research developments on single femtosecond-laser-induced nanostructures. We introduce the space-selective valence state manipulation of active ions, precipitation and control of metal nanoparticles and light polarization-dependent permanent nanostructures, and discuss the mechanisms and possible applications of the observed phenomena.

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