Position-Controlled Carbon Fiber Growth Catalyzed Using Electron Beam-Induced Chemical Vapor Deposition Ferrocene Nanopillars

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  • Mukawa Takahito
    CREST JST, Japan Science and Technology Co. Institute of Applied Physics, University of Tsukuba
  • Okada Satoshi
    CREST JST, Japan Science and Technology Co. Institute of Applied Physics, University of Tsukuba
  • Kobayashi Ryota
    CREST JST, Japan Science and Technology Co. Institute of Applied Physics, University of Tsukuba
  • Fujita Jun-ichi
    CREST JST, Japan Science and Technology Co. Institute of Applied Physics, University of Tsukuba
  • Ishida Masahiko
    CREST JST, Japan Science and Technology Co. Fundamental and Environmental Research Laboratories, NEC Corporation
  • Ichihashi Toshinari
    CREST JST, Japan Science and Technology Co. Fundamental and Environmental Research Laboratories, NEC Corporation
  • Ochiai Yukinori
    CREST JST, Japan Science and Technology Co. Fundamental and Environmental Research Laboratories, NEC Corporation
  • Kaito Takashi
    CREST JST, Japan Science and Technology Co. SII Nanotechnology Inc.
  • Matsui Shinji
    CREST JST, Japan Science and Technology Co. University of Hyogo, Graduate School of Science, LASTI

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Abstract

We demonstrated nanotube growth on a position-controlled catalyst using electron beam-induced chemical vapor deposition (EB-CVD) ferrocene nanopillars. While solid phase graphitization was induced at 650°C, iron nanoparticles only appeared on the surface by eroding the surrounding graphite triggered by the gas phase carbon fiber growth, at a temperature higher than 800°C using ethanol vapor. The precise position control achieved by EB-CVD directly reflected that of carbon fiber growth, which is a promising position-controlled carbon nanotube growth method for future device applications.

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