光干渉型サーフェスエンコーダに関する研究  [in Japanese] A Surface Encoder Based on Wave Optics  [in Japanese]

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Abstract

2次元角度センサと表面に2次元正弦波パターンを有す2次元角度格子からなるサーフェスエンコーダを波動光学的に解析した結果, 角度格子の5自由度の運動に対して角度センサ受光素子上で生成される干渉パターンが各運動によって異なる挙動を示すことを見出した. ここでは, スポットの挙動を独自の多素子型PDで検出することで5自由度の運動を分離測定する手法を提案し, 有効性をシミュレーションで確認した.

A surface encoder, which is composed of a 2D angle grid and a 2D slope sensor, is analyzed in wave optics. Based on the wave optics model, behavior of optical diffraction pattern on the photo-detector caused by 5-degree-of-freedom motions of the angle grid, which are the X-(Y-) movement, tilt motion about the X-(Y-) axis and rotation about the Z-axis, are investigated. The diffraction pattern on the photo-detector show different behavior in each of the motions. In addition, a new 5 degree-of-freedom measurement method is proposed based on the analysis results. This method uses a multi-cell photodiode instead of the QPD in the slope sensor. The principle of the new surface encoder and the design of the multi-cell photodiode are described. Simulation results based on the wave optics model are also presented.

Journal

  • Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers

    Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers 71(8), 1051-1055, 2005-08-05

    The Japan Society for Precision Engineering

References:  13

Codes

  • NII Article ID (NAID)
    10016679183
  • NII NACSIS-CAT ID (NCID)
    AA11966630
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    13488724
  • NDL Article ID
    7445003
  • NDL Source Classification
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL Call No.
    Z74-D889
  • Data Source
    CJP  NDL  NII-ELS  J-STAGE 
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